Yeyiphi eyona nto ibalaseleyo yokuyisebenzisa kwi-CMP egcina umsesane

Yeyiphi eyona nto ilungileyo yokuyisebenzisa kwi-CMP egcina umsesane?

I-Silicon I-Wafirs i-seficon ye-silicon isetyenziswa kwimveliso ye-selicond semiconductorther iseti yemveliso yemveliso ye-sefionder kwaye ibonisa i-intshi embalwa, emele ukukhululwa kwe I-Silicon Wafer, engcono ukwenziwa kwesi silicon wafer, okomeleleyo ukuvelisa amandla, ngenxa yemveliso yeWefrs, izinga lokuvelisa liye laba yimeko ebaluleke kakhulu, ye-CMP Inkqubo yokuphucula i-Polingle iyakwazi ngakumbi kwaye inesidima ngakumbi, ngoko ke inkqubo yokuphumelela isebenzise i-COPMPE ye-CMP eqolileyo

Ngexesha lokusebenza kwe-polling wafe, i-CMP egcina umsesane kufuneka ibambe i-wafer ngexesha lenkqubo yokuphucula. Ngexesha lenkqubo yokuphola, iikhemikhali ezahlukeneyo zongezwa, kwaye ezi zityholo zinokubonga izinto ezingcolileyo, ngoko kufuna ukuba i-CMP igcina i-rings ukuba ikwazi ukumelana nemithwalo ethile, ukuguquguquka okuhle kunye nezinye iimpawu.

Ukuzama ukwenza, ukwenza amakhonkco e-CPP, sifuna iiprosesa zezokulungisa kakhulu ukuqhubekisa kunye nokuzinza okuphezulu kokunciphisa ukunciphisa ukukora kwe-waflers kamva.

Ngokwesiqhelo sikhetha iiplasitiki ezimbini zobunjineli: i-PPS kunye ne-PEV zokusebenza kwaye zivelise amakhonkco e-CPP.

Izinto ze-PPS zibonakaliswa kukunganyangeki okuphezulu, ukumelana nemichiza elungileyo kunye nokunganyangeki kwesilivere, i-propties elungileyo, ilanga lingayi kungcolisa i-feek cmp, ithelekiswa ne-CPS ye-CPS Ezantsi, kwaye wenza itsheyini epheleleyo yemizi-mveliso, kunye nosapho kuqaqambisa ukusebenza kweendleko.

I-Peek CMP igcina umsesane usebenze ngokungxama, xa kuthelekiswa ne-PPS ye-CPS kugcina i-PRPS yokuSebenza igqibelele, inomgangatho obanzi kwaye obanzi wokungavisisani kwe-CPE ye-CPE, ukuze kwenziwe iringi kwi-ring Ikota yendawo ephezulu yokusingqongileyo izinzile ngakumbi, kwixesha elifanayo, iimeko ezifanayo zokusebenza, kodwa iindleko ziya kuphathelelwa kwezinye.